High-accuracy (strain gauge/ RENGAGE™) probes | Machine type | Transmission type | Repeatability (2σ) | 3D lobing | Maximum recommended stylus length |
OMP400 | Small – medium | Optical | 0.25 µm | ±1.00 µm | 200 mm |
OMP600 | Medium – large | Optical | 0.25 µm | ±1.00 µm | 200 mm |
RMP600 | Medium – large | Radio | 0.25 µm | ±1.00 µm | 200 mm |
MP250 | Grinder | Hard-wired | 0.25 µm | ±1.00 µm | 100 mm |
Scanning probe | Machine type | Transmission type | Scanning measurement range2 | Maximum scanning deflection (typical)3 |
Maximum recommended stylus length |
OSP60 | Small – large | Optical | ±XY 0.3 mm (0.012 in) ±Z 0.15 mm (0.006 in) |
±XY 0.80 mm (0.031 in) +Z 0.61 mm (0.024 in) |
150 mm |